Soft-EPi produces a variety of GaN and AlGaN template substrates requested by customers.

AlGaN Template

AlGaN Template

- Substrate : Patterned Sapphire Substrate

- Growth Equipment : MOCVD

- Wavelength : ~ 350 nm

※ XRD Quality

- (002) : < 250 arcsec

- (102) : < 350 arcsec

GaN Template

Semipolar GaN Template

- Substrate : Patterned Sapphire Substrate

- Wavelength : ~ 367nm

* Plane : (11-22)

Nonpolar GaN Template

- Substrate : Patterned Sapphire Substrate

- Wavelength : ~ 367nm

* Plane : (11-20)

c-plane GaN Template

- Substrate : Planner Sapphire Substrate

- Wavelength : ~ 367nm

- Plane : c-plane

- Type : un-doped, n-type