Template

Soft-EPi produces a variety of GaN and AlGaN template substrates requested by customers.

AlGaN Template

AlGaN Template
- Substrate : Patterned Sapphire Substrate
- Growth Equipment : MOCVD
- Wavelength : ~ 350 nm
※ XRD Quality
- (002) : < 250 arcsec
- (102) : < 350 arcsec

GaN Template

Semipolar GaN Template
- Substrate : Patterned Sapphire Substrate
- Wavelength : ~ 367nm
* Plane : (11-22)
Nonpolar GaN Template
- Substrate : Patterned Sapphire Substrate
- Wavelength : ~ 367nm
* Plane : (11-20)
c-plane GaN Template
- Substrate : Planner Sapphire Substrate
- Wavelength : ~ 367nm
- Plane : c-plane
- Type : un-doped, n-type