Soft-EPi produces a variety size of semi insulating GaN substrates requested by customers.
Semi insulating GaN
Substrate | Sapphire |
Wafer Size | 2, 4, 6-inch |
Thickness | 3 ~ 5 ㎛ (± 0.3 ㎛) |
Orientation of GaN | C-Plane |
Resistivity (300K) | > 106 Ω·cm |
Carrier Concentration | > 2E1018 cm-3 (C-doping concentration) |
Surface Roughness | < 0.3nm |