Template

AlGaN Template
GaN Template

* AlGaN Template I

- Substrate : Patterned Sapphire Substrate
- Growth Equipment : MOCVD
- Wavelength : ~350nm

* XRD Quality
- (002) : < 250 arcsec
- (102) : < 350 arcsec

* AlGaN Template II

- Substrate : Planner Sapphire Substrate
- Growth Equipment : MOCVD
- Wavelength : ~330nm

* XRD Quality
- (002) : < 200 arcsec
- (102) : < 600 arcsec

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