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Template
AlGaN Template
GaN Template
* AlGaN Template I
- Substrate : Patterned Sapphire Substrate
- Growth Equipment : MOCVD
- Wavelength : ~350nm
* XRD Quality
- (002) : < 250 arcsec
- (102) : < 350 arcsec
* AlGaN Template II
- Substrate : Planner Sapphire Substrate
- Growth Equipment : MOCVD
- Wavelength : ~330nm
* XRD Quality
- (002) : < 200 arcsec
- (102) : < 600 arcsec
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